[B-9-1] Suppression of Short Channel Hump of nMOSFET Using NF3-Added ILD HDP Process

Joo-Seog Park、Se-Kyung Choi、Myung-Jong Bong、Seok-Chul Chung、Hyuck-Chai Jung、Nam-Sung Kim、Tae-Un Youn、Young-Woo Kwon、Il-Gweon Kim (1.Device&PI-BC Team, Memory R&D Division, Hynix Semiconductor Inc.)

https://doi.org/10.7567/SSDM.2002.B-9-1