[B-9-1] Suppression of Short Channel Hump of nMOSFET Using NF3-Added ILD HDP Process

Joo-Seog Park, Se-Kyung Choi, Myung-Jong Bong, Seok-Chul Chung, Hyuck-Chai Jung, Nam-Sung Kim, Tae-Un Youn, Young-Woo Kwon, Il-Gweon Kim (1.Device&PI-BC Team, Memory R&D Division, Hynix Semiconductor Inc.)

https://doi.org/10.7567/SSDM.2002.B-9-1