Lattice Strain in Scaled Devices Revealed by Using Convergent-Beam Electron Diffraction

Akio Toda; Kensuke Okonogi; Nobuyuki Ikarashi; Haruhiko Ono

doi:https://doi.org/10.7567/SSDM.2002.C-1-3

[C-1-3] Lattice Strain in Scaled Devices Revealed by Using Convergent-Beam Electron Diffraction

Akio Toda、Kensuke Okonogi、Nobuyuki Ikarashi、Haruhiko Ono (1.Silicon Systems Research Laboratories, NEC Corporation、2.Device Development Department, Device Development Division, Elpida Memory Inc.)

https://doi.org/10.7567/SSDM.2002.C-1-3

2002 International Conference on Solid State Devices and Materials

[C-1-3] Lattice Strain in Scaled Devices Revealed by Using Convergent-Beam Electron Diffraction