[C-7-3] Impact of Nitrogen Profile on Negative-Bias Temperature Instability and CMOS Performance

M. Terai、T. Yamamoto、K. Watanabe、M. Togo、K. Masuzaki、N. Ikezawa、T. Tatsumi、T. Mogami (1.Silicon Systems Research Labs., NEC Corporation)

https://doi.org/10.7567/SSDM.2002.C-7-3