[C-7-3] Impact of Nitrogen Profile on Negative-Bias Temperature Instability and CMOS Performance
M. Terai, T. Yamamoto, K. Watanabe, M. Togo, K. Masuzaki, N. Ikezawa, T. Tatsumi, T. Mogami
(1.Silicon Systems Research Labs., NEC Corporation)
https://doi.org/10.7567/SSDM.2002.C-7-3
