The Japan Society of Applied Physics

[C-9-5] Electrical Properties of High-k MIM Interlevel Capacitors Prepared for RF-CMOS Device Applications

M. Tarutani, K. Shintani, T. Mori, K. Nishikawa, Y. Hashizume, S. Yamakawa, H. Takada, T. Oomori (1.Advanced Technology R&D Center, Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.2002.C-9-5