The Japan Society of Applied Physics

[D-1-5] Notable Advantages of High Performance SOI Technology beyond 90nm Generation

Hee-Sung Kang、Chang-Bong Oh、Young-Wug Kim、Kyung-Soo Kim、Kwang-Pyuk Suh (1.Technology Development PJT, System LSI Division, Semiconductor Business, Samsung Electronics Co. Ltd.)

https://doi.org/10.7567/SSDM.2002.D-1-5