Notable Advantages of High Performance SOI Technology beyond 90nm Generation

Hee-Sung Kang; Chang-Bong Oh; Young-Wug Kim; Kyung-Soo Kim; Kwang-Pyuk Suh

doi:https://doi.org/10.7567/SSDM.2002.D-1-5

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[D-1-5] Notable Advantages of High Performance SOI Technology beyond 90nm Generation

Hee-Sung Kang, Chang-Bong Oh, Young-Wug Kim, Kyung-Soo Kim, Kwang-Pyuk Suh (1.Technology Development PJT, System LSI Division, Semiconductor Business, Samsung Electronics Co. Ltd.)

https://doi.org/10.7567/SSDM.2002.D-1-5

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