[D-7-2] Ultra Thin Body Silicon-On-Insulator (UTB SOI) MOSFET with Metal Gate Work-function Engineering for sub-70 nm Technology Node

Daewon Ha、Pushkar Ranade、Yang-Kyu Choi、Jeong-Soo Lee、Tsu-Jae King、Chenming Hu (1.University of California at Berkeley, Department of Electrical Engineering and Computer Science)

https://doi.org/10.7567/SSDM.2002.D-7-2