Silicon-On-Low-K Substrate(SOLK) Technology for High-Speed and Low-Power Devices

Y. Yamada; Y. Igarashi; T. Morooka; T. Nakamura; J. C. Shim; H. Kurino; M. Koyanagi

doi:https://doi.org/10.7567/SSDM.2002.D-8-4

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[D-8-4] Silicon-On-Low-K Substrate(SOLK) Technology for High-Speed and Low-Power Devices

Y. Yamada, Y. Igarashi, T. Morooka, T. Nakamura, J. C. Shim, H. Kurino, M. Koyanagi (1.Department of Machine Intelligence and Systems Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2002.D-8-4

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