Silicon-On-Low-K Substrate(SOLK) Technology for High-Speed and Low-Power Devices

Y. Yamada; Y. Igarashi; T. Morooka; T. Nakamura; J. C. Shim; H. Kurino; M. Koyanagi

doi:https://doi.org/10.7567/SSDM.2002.D-8-4

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[D-8-4] Silicon-On-Low-K Substrate(SOLK) Technology for High-Speed and Low-Power Devices

Y. Yamada、Y. Igarashi、T. Morooka、T. Nakamura、J. C. Shim、H. Kurino、M. Koyanagi (1.Department of Machine Intelligence and Systems Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2002.D-8-4

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