[D-9-4] Hot-Carrier-induced Degradation on 0.1μm Partially Depleted SOI CMOSFET with thin Oxide

Wen-Kuan Yeh, Wen-Han Wang, Yean-Kuen Fang, Fu-Liang Yang (1.Department of Electrical Engineering, National University of Kaohsiung, 2.VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, 3.Taiwan Semiconductor Manufacturing Company, Device Engineering Division)

https://doi.org/10.7567/SSDM.2002.D-9-4