[D-9-5] Grain-Boundary Related Hot Carrier Degradation Mechanism in Low-Temperature Poly-Si Thin-Film-Transistors

T. Yoshida、Y. Ebiko、M. Takei、N. Sasaki、T. Tsuchiya (1.Interdisciplinary Faculty of Science and Engineering, Shimane University、2.Silicon Technologies Labs, Fujitsu Laboratories LTD)

https://doi.org/10.7567/SSDM.2002.D-9-5