Submicron InP Bipolar Transistors: Scaling Laws, Technology Roadmaps, Advanced Fabrication Processes

M. J. W. Rodwell; D. Scott; M. Urteaga; M. Dahlstrom; S. Krishnan; Z. Griffith; Y. Wei; N. Parthasarathy; Y-M Kim

doi:https://doi.org/10.7567/SSDM.2002.E-1-1

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[E-1-1] Submicron InP Bipolar Transistors: Scaling Laws, Technology Roadmaps, Advanced Fabrication Processes

M. J. W. Rodwell, D. Scott, M. Urteaga, M. Dahlstrom, S. Krishnan, Z. Griffith, Y. Wei, N. Parthasarathy, Y-M Kim (1.Department of ECE, University of California)

https://doi.org/10.7567/SSDM.2002.E-1-1

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