Submicron InP Bipolar Transistors: Scaling Laws, Technology Roadmaps, Advanced Fabrication Processes

M. J. W. Rodwell; D. Scott; M. Urteaga; M. Dahlstrom; S. Krishnan; Z. Griffith; Y. Wei; N. Parthasarathy; Y-M Kim

doi:https://doi.org/10.7567/SSDM.2002.E-1-1

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[E-1-1] Submicron InP Bipolar Transistors: Scaling Laws, Technology Roadmaps, Advanced Fabrication Processes

M. J. W. Rodwell、D. Scott、M. Urteaga、M. Dahlstrom、S. Krishnan、Z. Griffith、Y. Wei、N. Parthasarathy、Y-M Kim (1.Department of ECE, University of California)

https://doi.org/10.7567/SSDM.2002.E-1-1

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