[E-3-2] Suppression of B outdiffusion by C incorporation in ultra-high-speed SiGeC HBTs
Katsuya Oda, Isao Suzumura, Makoto Miura, Eiji Ohue, Reiko Hayami, Akihiro Kodama, Hiromi Shimamoto, Katsuyoshi Washio
(1.Central Research Laboratory, Hitachi, Ltd., 2.Musashino Office, Hitachi Device Engineering, Co. Ltd.)
https://doi.org/10.7567/SSDM.2002.E-3-2
