Genuine Technologies for Three-Dimentional (3D) LSI

Katsuya Okumura; Nobuo Hayasaka

doi:https://doi.org/10.7567/SSDM.2002.F-4-2

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[F-4-2] Genuine Technologies for Three-Dimentional (3D) LSI

Katsuya Okumura, Nobuo Hayasaka (1.Research Center for Advanced Science and Technology, The University of Tokyo, 2.Semiconductor Company, Toshiba Corp.)

https://doi.org/10.7567/SSDM.2002.F-4-2

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