[P11-3] Uniformity improvement of SiGe HBT by reduced extrinsic base implanted damage

Li-Shyue Lai, Chieh-Shuo Liang, Yung-Tai Tseng, Zing-Wei Pei, Yu-Min Hsu, Peng-Shiu Chen, Shin-Chii Lu, Chung-Ming Liu, Ming-Jinn Tsai (1.Div. of Semiconductor Device Technology, Electronics Research and Service Organization, Industrial Technology Research Institute)

https://doi.org/10.7567/SSDM.2002.P11-3