[P3-15] Low Power CMOS Process Technologies and Characteristics for advanced High Density Mobile DRAM

Chi Hoon Lee, Nam Hyuk Jo, Dong Gun Park, Duk Dong Kang, Dong-Ho Ahn, Chan Seong Hwang, Tae Sung Kim, Hyeong Joon Kim, wonshik Lee (1.School of Materials Science & Engineering, Seoul National University, 2.DRAM Process Architecture Team, Process Development Team, Memory Product & Technology Division, Samsung Electronics Co., Ltd.)

https://doi.org/10.7567/SSDM.2002.P3-15