The Japan Society of Applied Physics

[P4-7] Frequency Dependence of Capacitance Measurement for Advanced Gate Dielectrics

Kevin J. Yang, Hideki Takeuchi, Tsu-Jae King, Chenming Hu (1.University of California, Department of Electrical Engineering and Computer Sciences)

https://doi.org/10.7567/SSDM.2002.P4-7