[P5-9] Thermal Stability of Plasma-treated Ohmic Contact to n-GaN

Chien-Chi Lee, Meng-Shin Yeh, Sheng-Di Lin, Chien-Ping Lee, Wei-I Lee, Cheng Ta Kuo (1.Dept. of electronics engineering, National Chiao Tung Univ., 2.Dept. of electrophysics, National Chiao Tung Univ., 3.Advanced Epitaxy Technology Inc.)

https://doi.org/10.7567/SSDM.2002.P5-9