[P5-9] Thermal Stability of Plasma-treated Ohmic Contact to n-GaN

Chien-Chi Lee、Meng-Shin Yeh、Sheng-Di Lin、Chien-Ping Lee、Wei-I Lee、Cheng Ta Kuo (1.Dept. of electronics engineering, National Chiao Tung Univ.、2.Dept. of electrophysics, National Chiao Tung Univ.、3.Advanced Epitaxy Technology Inc.)

https://doi.org/10.7567/SSDM.2002.P5-9