Evaluation of lattice distortion with nanometer resolution in Si single-electron transistor

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

M. Nagase, S. Horiguchi, A. Fujiwara, Y. Takahashi (1.NTT Basic Research Laboratories, NTT Corporation)