The Japan Society of Applied Physics

2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[A-1-3] New Self-aligned Metal-gate MOSFETs Using Aluminum Substitution Technology

S. Nakamura, H. Shido, T. Kurahashi, S. Kishii, T. Nagata, B. Kumasaka, T. Usuki, S. Sato, Y. Mishima (1.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2003.A-1-3