Intelligent BSIM4 Model Parameter Extraction for Sub-100 nm MOSFETs era

Yiming Li; Yen-Yu Cho

doi:https://doi.org/10.7567/SSDM.2003.A-8-3

[A-8-3] Intelligent BSIM4 Model Parameter Extraction for Sub-100 nm MOSFETs era

Yiming Li, Yen-Yu Cho (1.Department of Nano Device Technology, National Nano Device Laboratories, 2.Microelectronics and Information Systems Research Center, National Chiao Tung University, 3.Department of Computer and Information Science, National Chiao Tung University)

https://doi.org/10.7567/SSDM.2003.A-8-3

2003 International Conference on Solid State Devices and Materials

[A-8-3] Intelligent BSIM4 Model Parameter Extraction for Sub-100 nm MOSFETs era