[B-8-2] Pre-amorphization and co-implantation suitability for advanced PMOS devices integration

Radu Surdeanu、Bartek J. Pawlak、Richard Lindsay、Mark van Dal、Gerben Doornbos、Charles J.J. Dachs、Youri V. Ponomarev、Josine J. Loo、Kirklen Henson、Marcel A. Verheijen、Monja Kaiser、Xavier Pages、Malgorzata Jurczak、Peter A. Stolk (1.Philips Research Leuven、2.IMEC、3.Philips Research Laboratories、4.ASM International、5.now at Philips Semiconductors)

https://doi.org/10.7567/SSDM.2003.B-8-2