Mobility in high-κ dielectric based field effect transistors

L-A Ragnarsson; W. Tsai; A. Kerber; P.J. Chen; E. Cartier; L. Pantisano; S. De Gendt; M. Heyns

doi:https://doi.org/10.7567/SSDM.2003.C-1-1

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[C-1-1] Mobility in high-κ dielectric based field effect transistors

L-A Ragnarsson, W. Tsai, A. Kerber, P.J. Chen, E. Cartier, L. Pantisano, S. De Gendt, M. Heyns (1.IMEC, 2.Intel Corp., 3.Infineon, 4.Texas Instruments, 5.IBM)

https://doi.org/10.7567/SSDM.2003.C-1-1

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