[C-4-1] Pt/BST/Pt Capacitor Technology for 0.15μm Embedded DRAM

Y. Tsunemine, T. Okudaira, K. Kashihara, A. Yutani, K. Yamada, H. Shinkawata, M. K. Mazumder, Y. Ohno, H. Itoh, M. Yoneda, Y. Okuno, A. Tsuzumitani, H. Ogawa, Y. Mori (1.ULSI Development Center, Mitsubishi Electric Corp., 2.ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corp.)

https://doi.org/10.7567/SSDM.2003.C-4-1