The Japan Society of Applied Physics

[D-3-2] Fabrication of Ultra-Thin Strained Ge-on-Insulator Substrate by Ge-Condensation Technique

Shu Nakaharai、Tsutomu Tezuka、Naoharu Sugiyama、Yoshihiko Moriyama、Shin-ichi Takagi (1.MIRAI project, Association of Super-Advanced Electronics Technology (ASET))

https://doi.org/10.7567/SSDM.2003.D-3-2