The Japan Society of Applied Physics

[D-4-2] Novel SOI MOSFETs with Buried Back-Gate

Hyuckjae Oh、Hoon Choi、Takeshi Sakaguchi、JeoungChill Shim、Hiroyuki Kurino、Mitsumasa Koyanagi (1.Dept. of Bioengineering and Robotics , Tohoku University、2.Venture Business Laboratory, Tohoku University)

https://doi.org/10.7567/SSDM.2003.D-4-2