Modeling of Fully-depleted SOI Device Variation

Hirotaka Komatsubara; Koichi Kishiro; Yasuaki Kawai; Noriyuki Miura; Koichi Fukuda

doi:https://doi.org/10.7567/SSDM.2003.D-4-3

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[D-4-3] Modeling of Fully-depleted SOI Device Variation

Hirotaka Komatsubara、Koichi Kishiro、Yasuaki Kawai、Noriyuki Miura、Koichi Fukuda (1.System LSI Research Division, Oki Electric Industry Co., Ltd.、2.Miyagi Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.2003.D-4-3

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