[D-8-1] Thermal Instability of Poly-Si Gate Al2O3 MOSFETs

W.S. Kim、T. Kawahara、H. Itoh、H. Horiuchi、A. Muto、T. Maeda、R. Mitsuhashi、K. Torii、H. Kitajima (1.Semiconductor Leading Edge Technologies, Inc.)

https://doi.org/10.7567/SSDM.2003.D-8-1