The Japan Society of Applied Physics

[D-8-5L] Advanced SiGe-free Strained Si on Insulator Substrates: Thermal Stability and Carrier Mobility Enhancement

T. A. Langdo、M. Erdtmann、C. W. Leitz、M. T. Currie、A. Lochtefeld、Z. Cheng、J. A. Carlin、V. K. Yang、C. J. Vineis、C. Major、G. Braithwaite、H. Badawi、M. T. Bulsara (1.AmberWave Systems Corporation)

https://doi.org/10.7567/SSDM.2003.D-8-5L