[P10-2] New Three Dimensional High Density S-SGT Flash Memory Architecture using Self-Aligned Interconnection Fabricating Technology without Photo Lithography Process for Tera Bits and Beyond

Hiroshi Sakuraba, Kazushi Kinoshita, Takuji Tanigami, Takashi Yokoyama, Shinji Horii, Masahiro Saitoh, Keizou Sakiyama, Tetsuo Endoh, Fujio Masuoka (1.The Research Institute of Electrical Communication, TOHOKU University, 2.Advanced Technology Development Center, Sharp Corporation)

https://doi.org/10.7567/SSDM.2003.P10-2