[P10-4] Key Technologies of First ‘Chain’- 32 Mbit Ferroelectric RAM

T. Ozaki, N. Nagel, Y. Kumura, J. Lian, A. Hilliger, T. Tsuchiya, R. Bruchhaus, H. Kanaya, H. Koyama, U. Wellhausen, O. Hidaka, S. Shuto, S. Gernhardt, Y. Shimojo, B. K. Moon, H. Itokawa, U. Egger, H. Zhuang, K. Tomioka, M. Fukushima, K. Yamakawa, D. Takashima, I. Kunishima, Y. Oowaki, G. Beitel (1.Semiconductor Company, Toshiba Corporation, Infineon Technologies Japan K.K.)

https://doi.org/10.7567/SSDM.2003.P10-4