[P10-5] High Performance Pt/ SrBi2Ta2O9/ HfO2/ Si Structure for 1T Ferroelectric Random Access Memory

Ding-Yeong Wang, Chao-Hsin Chien, Ming-Jui Yang, Peer Lehnen, Ching-Chich Leu, Shiow-Huey Chuang, Tiao-Yuan Huang, C. Y. Chang (1.Department of Electronics Engineering, National Chiao Tung University, 2.National Nano Device Laboratories, 3.AIXTRON AG, Germany)

https://doi.org/10.7567/SSDM.2003.P10-5