A Study of ESD Protection under Pad Design for Copper-Low K VLSI Circuits

Jam-Wem Lee; Alice Chao; Yiming Li; Howard Tang

doi:https://doi.org/10.7567/SSDM.2003.P12-3

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P12-3] A Study of ESD Protection under Pad Design for Copper-Low K VLSI Circuits

Jam-Wem Lee, Alice Chao, Yiming Li, Howard Tang (1.Department of Nano Device Technology, National Nano Device Laboratories, 2.Microelectronics and Information Systems Research Center, National Chiao Tung University, 3.United Microelectronics Corporation)

https://doi.org/10.7567/SSDM.2003.P12-3

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