A Study of ESD Protection under Pad Design for Copper-Low K VLSI Circuits

Jam-Wem Lee; Alice Chao; Yiming Li; Howard Tang

doi:https://doi.org/10.7567/SSDM.2003.P12-3

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P12-3] A Study of ESD Protection under Pad Design for Copper-Low K VLSI Circuits

Jam-Wem Lee、Alice Chao、Yiming Li、Howard Tang (1.Department of Nano Device Technology, National Nano Device Laboratories、2.Microelectronics and Information Systems Research Center, National Chiao Tung University、3.United Microelectronics Corporation)

https://doi.org/10.7567/SSDM.2003.P12-3

▲