Optimization of STI Stress and Active Geometry Configuration for Advanced CMOS Devices

Tony Lin; Yoyi Gong; J. T. Tseng; Lorenzo Yu; Tzermin Shen; Daniel Chen; T. P. Chen; C. L. Kuo; W. T. Shiau; J. K. Chen; S. C. Chien; S. W. Sun

doi:https://doi.org/10.7567/SSDM.2003.P2-2

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P2-2] Optimization of STI Stress and Active Geometry Configuration for Advanced CMOS Devices

Tony Lin、Yoyi Gong、J. T. Tseng、Lorenzo Yu、Tzermin Shen、Daniel Chen、T. P. Chen、C. L. Kuo、W. T. Shiau、J. K. Chen、S. C. Chien、S. W. Sun (1.Central R&D Division, United Microelectronics Corporation)

https://doi.org/10.7567/SSDM.2003.P2-2

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