The Japan Society of Applied Physics

[P2-2] Optimization of STI Stress and Active Geometry Configuration for Advanced CMOS Devices

Tony Lin、Yoyi Gong、J. T. Tseng、Lorenzo Yu、Tzermin Shen、Daniel Chen、T. P. Chen、C. L. Kuo、W. T. Shiau、J. K. Chen、S. C. Chien、S. W. Sun (1.Central R&D Division, United Microelectronics Corporation)

https://doi.org/10.7567/SSDM.2003.P2-2