A Variable Channel-Size MOSFET with LDD Structure

Naoki NAKANOSE; Yutaka ARIMA; Tanemasa ASANO; Yasuhiro KOSASAYAMA; Masashi UENO; Masafumi KIMATA

doi:https://doi.org/10.7567/SSDM.2003.P2-7

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P2-7] A Variable Channel-Size MOSFET with LDD Structure

Naoki NAKANOSE、Yutaka ARIMA、Tanemasa ASANO、Yasuhiro KOSASAYAMA、Masashi UENO、Masafumi KIMATA (1.Center for Microelectronic Systems, Kyushu Institute of Technology、2.Sensing Technology Dept., Advanced Technology R & D Ctr., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.2003.P2-7

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