Novel Storage-Node Contacts with Stacked PCM-Sp-TiN Barrier for MIM-Ru/Ta2O5/Ru Capacitors in Giga-Bit DRAMs

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

Tsuyoshi Kawagoe, Yoshitaka Nakamura, Keiji Kuroki, Isamu Asano, Hidekazu Goto, Naruhiko Nakanishi (1.Elpida Memory, Inc.)