[P3-1] Novel Storage-Node Contacts with Stacked PCM-Sp-TiN Barrier for MIM-Ru/Ta2O5/Ru Capacitors in Giga-Bit DRAMs

Tsuyoshi Kawagoe、Yoshitaka Nakamura、Keiji Kuroki、Isamu Asano、Hidekazu Goto、Naruhiko Nakanishi (1.Elpida Memory, Inc.)

https://doi.org/10.7567/SSDM.2003.P3-1