The Japan Society of Applied Physics

2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P3-10] A Novel Photosensitive Porous Low-k Interlayer Dielectric Film

Shin-Ichiro Kuroki, Toshiaki Hirota, Takamaro Kikkawa (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.TAZMO Co.,Ltd.)

https://doi.org/10.7567/SSDM.2003.P3-10