[P3-10] A Novel Photosensitive Porous Low-k Interlayer Dielectric Film

Shin-Ichiro Kuroki、Toshiaki Hirota、Takamaro Kikkawa (1.Research Center for Nanodevices and Systems, Hiroshima University、2.TAZMO Co.,Ltd.)

https://doi.org/10.7567/SSDM.2003.P3-10