[P3-18] Influence of interface layers and bottom electrodes on (Ba,Sr)TiO3 thin film leakage current

Masaki Yamato、Hiroshi Yamada、Takamaro Kikkawa (1.Research Center for Nanodevice and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.P3-18