Influence of interface layers and bottom electrodes on (Ba,Sr)TiO3 thin film leakage current

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

Masaki Yamato, Hiroshi Yamada, Takamaro Kikkawa (1.Research Center for Nanodevice and Systems, Hiroshima University)