Improving the Accuracy of Modified Shift-and-Ratio Channel Length Extraction Method Using Scanning Capacitance Microscopy

Chee-Wee Eng; Wai-Shing Lau; Yao-Yao Jiang; David Vigar; Kheng-Chok Tee; Lap Chan; Vanissa Sei-Wei Lim; Alastair Trigg

doi:https://doi.org/10.7567/SSDM.2003.P4-1

[P4-1] Improving the Accuracy of Modified Shift-and-Ratio Channel Length Extraction Method Using Scanning Capacitance Microscopy

Chee-Wee Eng、Wai-Shing Lau、Yao-Yao Jiang、David Vigar、Kheng-Chok Tee、Lap Chan、Vanissa Sei-Wei Lim、Alastair Trigg (1.School of Electrical and Electronic Engineering, Nanyang Technological University、2.Department of Technology Development, Chartered Semiconductor Manufacturing Ltd、3.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2003.P4-1

2003 International Conference on Solid State Devices and Materials

[P4-1] Improving the Accuracy of Modified Shift-and-Ratio Channel Length Extraction Method Using Scanning Capacitance Microscopy