[P4-1] Improving the Accuracy of Modified Shift-and-Ratio Channel Length Extraction Method Using Scanning Capacitance Microscopy

Chee-Wee Eng, Wai-Shing Lau, Yao-Yao Jiang, David Vigar, Kheng-Chok Tee, Lap Chan, Vanissa Sei-Wei Lim, Alastair Trigg (1.School of Electrical and Electronic Engineering, Nanyang Technological University, 2.Department of Technology Development, Chartered Semiconductor Manufacturing Ltd, 3.Institute of Microelectronics)

https://doi.org/10.7567/SSDM.2003.P4-1