[P4-15] Characterization and Comparison of Strained Si1-yCy MOSFET Grown by Gas Source MBE and Hot Wire Cell Method

Tatsuro Watahiki, Katsuya Abe, Akira Yamada, Makoto Konagai (1.Department of Physical Electronics, Tokyo Institute of Technology, 2.Department of Electrical and Electronic Engineering, Shinshu University, 3.Research Center for Quantum Effect Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2003.P4-15